Radial support acoustic-wave silicon micromachined gyroscope

• Main Author: SI HONGKANG
• Format: Patent
• Language: English
• Published: 01.04.2015
• Subjects: GYROSCOPIC INSTRUMENTS; MEASURING; MEASURING DISTANCES, LEVELS OR BEARINGS; NAVIGATION; PHOTOGRAMMETRY OR VIDEOGRAMMETRY; PHYSICS; SURVEYING; TESTING

The utility model discloses a radial support acoustic-wave silicon micromachined gyroscope in the micro electromechanical technical field. The radial support acoustic-wave silicon micromachined gyroscope comprises a circular-disc-shaped harmonic oscillator, a lateral supporting arm, a circular-arc-shaped drive electrode, a capacitance detecting electrode with a displacement amplifying mechanism, a detecting electrode fixing boss and a base plate. The gyroscope adopts two in-plane four-amplitude wave node frequency matching modes of the circular-disc-shaped harmonic oscillator as a drive mode and a detecting mode, all structures of the gyroscope are realized on a silicon wafer (111) through a micro electronic mechanical processing process. The circular-disc-shaped harmonic oscillator is supported by the gyroscope through the lateral supporting mode, the input of the angular velocity can be measured through electrostatic driving and a method of amplifying and detecting the displacement output of the mode through a triangular amplifying mechanism, so that the sensitivity of the gyroscope is improved, the manufacturing process of the acoustic-wave silicon micromachined gyroscope is greatly simplified, the production cost is lowered, the impact resistance of the gyroscope is improved, the zero offset of the gyroscope is reduced and the precision of the gyroscope is improved.