Volume acoustic wave silicon micro-gyroscope with high sensitivity

• Main Author: SI HONGKANG
• Format: Patent
• Language: English
• Published: 01.04.2015
• Subjects: GYROSCOPIC INSTRUMENTS; MEASURING; MEASURING DISTANCES, LEVELS OR BEARINGS; NAVIGATION; PHOTOGRAMMETRY OR VIDEOGRAMMETRY; PHYSICS; SURVEYING; TESTING

The utility model discloses a volume acoustic wave silicon micro-gyroscope with high sensitivity, and belongs to the technical field of micro machinery and electron. The micro-gyroscope comprises a disk-shaped harmonic oscillator, a supporting cylinder, arc-shaped driving electrodes, detecting electrodes with displacement amplifying mechanisms, detecting electrode fixing bosses and a substrate. A matching modality of a wave node frequency of four wave amplitudes in the two surfaces of the disk-shaped harmonic oscillator is adopted by the micro-gyroscope as a driving modality and a detecting modality, and all the structures are realized on a silicon piece of which the crystal orientation is (111) through the micro machinery and electron processing technology. The micro-gyroscope utilizes the displacement amplifying mechanisms based on a lever principle to amplify a micro-displacement output under the detecting modality, so that the sensitivity of the gyroscope is improved, the processing technology of the volume acoustic wave silicon micro-gyroscope is greatly simplified, and the production cost is lowered.