Overturning driving device capable of achieving automatic substrate overturning under vacuum state

• Main Authors: LONG RULEI, DAI XIUHAI
• Format: Patent
• Language: English
• Published: 25.02.2015
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

The utility model relates to the technical field of vacuum film coating, in particular to an overturning driving device capable of achieving automatic substrate overturning under the vacuum state. The overturning driving device is characterized in that the overturning driving device is composed of an overturning driving stirring disc and an overturning driving mechanism, the overturning driving stirring disc is connected and fixed to the outer edge of an overturning film coating jig and provided with at least one clamping groove, and the clamping grooves are symmetrically distributed with the center of the overturning driving stirring disc as the symmetric center; the overturning driving mechanism is installed on a vacuum film coating machine, the overturning driving mechanism is provided with at least one telescopic stirring rod which is sleeved with a stirring rod bearing, the overall dimension of the stirring rod bearings is matched with the groove opening size of the clamping grooves, and the stirring rods can extend out to the stirring rod bearings to be matched with the clamping grooves in a rolling mode. The overturning driving device has the advantages that the overturning film coating jig is overturned through mechanical driving, a film coating substrate is overturned, and double-faced continuous film coating is achieved under the situation that the vacuum of a film coating cavity is not damaged.