Spraying device of wet etching machine

• Main Author: HOU FEI
• Format: Patent
• Language: English
• Published: 14.01.2015
• Subjects: BASIC ELECTRIC ELEMENTS; CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION ORPROCESSING OF GOODS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; SEMICONDUCTOR DEVICES; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS; TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINSTCLIMATE CHANGE

The utility model provides a spraying device of a wet etching machine and belongs to the mechanical equipment technical field. With the spraying device adopted, the problem of unevenness of water films of an existing spraying device can be solved. The spraying device for the wet etching machine comprises a tank body for accommodating an etching solution and a spraying head arranged above the tank body; the spraying head is connected with a water pipe; liquid conveying rolling wheels are arranged in the tank body; one end of each liquid conveying rolling wheel protrudes out from the tank body and is connected with a motor arranged at one side of the tank body; water driving rolling wheels and wheel shafts are arranged above the liquid conveying rolling wheels; the water driving rolling wheels sleeve the wheel shafts and idle; lifting structures for changing the height of the wheel shafts are arranged on side walls of the tank body; and wafers are conveyed between the liquid conveying rolling wheels and the water driving rolling wheels. With the spraying device of the wet etching machine adopted, water films on the surfaces of the wafers can be coated uniformly, and corrosion quantity reduction in an etching groove can be decreased.