All-metal capacitive pole plate micro accelerometer

• Main Authors: TAN GANG, LI YUPING, YAO MINGQIU, CHENG YONGSHENG, WANG XUGUANG, SHEN CHAOYANG, XI SHIWEI, TANG BIN
• Format: Patent
• Language: English
• Published: 29.10.2014
• Subjects: INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT; MEASURING; MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK; PHYSICS; TESTING

The utility model provides an all-metal capacitive pole plate micro accelerometer which has a three-layer all-metal structure including a moving pole plate, and upper and lower fixed pole plates, wherein the moving pole plate comprises an anchor point, a mass block, a cantilever beam and a framework. The anchor point is fixedly connected with the cantilever beam which is connected with the mass block to form a movable portion of a sensitive chip, and the anchor point is fixedly connected with the framework. Gaps exist between the mass block and the upper and lower fixed pole plates, and the upper and lower surfaces of the gaps are of all-metal structure. The upper fixed pole plate and the upper surface of the anchor point of the moving pole plate are in bonding connection, and the lower fixed pole plate and the lower surface of the anchor point are in bonding connection. The bonding is completed through hot pressing, and the gaps between the mass block and the upper and lower pole plates are flexibly and accurately controlled.