Gas pumping speed measuring device for vacuum-pumping system in vacuum equipment

• Main Authors: HU SHUANGLI, TAN GUOTANG, WU BIAOPING
• Format: Patent
• Language: Chinese; English
• Published: 20.08.2014
• Subjects: MEASURING; MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUIDLEVEL; METERING BY VOLUME; PHYSICS; TESTING

The utility model discloses a gas pumping speed measuring device for a vacuum-pumping system in vacuum equipment. The gas pumping speed measuring device comprises a vacuum sensor, a flow determining gas inlet device and a control device. The vacuum sensor and the flow determining gas inlet device are arranged on a vacuum-pumping pipeline in a communicated mode. The control device is connected with the vacuum sensor and the flow determining gas inlet device in an electric measurement and control mode. The control device controls the flow determining gas inlet device to act, collects the states of the flow determining gas inlet device and data information of the vacuum sensor and performs calculation and storage and determines the relation between the numerical value, measured by the vacuum sensor, of the vacuum degree and the numerical value of gas inlet flows of the flow determining gas inlet device. The vacuum degree is measured through the vacuum sensor, the flow determining gas inlet device is adopted for