Touch panel with optical matching layer structure

• Main Authors: LIN HANLUN, GUO CHONGLUN, WEI CANGLIANG
• Format: Patent
• Language: Chinese; English
• Published: 06.08.2014
• Subjects: CALCULATING; CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUSENAMELS; CHEMISTRY; COMPUTING; COUNTING; ELECTRIC DIGITAL DATA PROCESSING; GLASS; JOINING GLASS TO GLASS OR OTHER MATERIALS; METALLURGY; MINERAL OR SLAG WOOL; PHYSICS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS,MINERALS OR SLAGS; SURFACE TREATMENT OF GLASS

The utility model discloses a touch panel with an optical matching layer structure, wherein the optical matching layer structure is mainly composed of a SiNx layer and a SiOx layer, so that a film-plating machine used for forming the optical matching layer is characterized in that a single Si target (Si-Al target or Si-B target) is erected in a film-plating cavity, a specific gas is introduced and then the reaction starts so as to form the SiNx layer or the SiOx layer. During the process of preparing the optical matching layer, the erected Si target is utilized and the target is not exchanged, so that the use ratio of the film-plating machine is increased, the capacity is greatly increased, the target configuration is minimal, the purpose of increasing the preparing capacity of the optical matching layer is lastly achieved, the material cost and the material control cost of the optical matching layer are reduced and the yield of the optical matching layer is increased.