Electrical sample stage of X fluorescence thickness gauge

The utility model discloses an electrical sample stage of an X fluorescence thickness gauge, which comprises an XY-axis positioning assembly, a Z-axis positioning assembly, a sample stage plate, a bottom plate, and a controller, wherein the Z-axis positioning assembly is arranged on the bottom plate...

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Bibliographic Details
Main Author SONG HANHUA
Format Patent
LanguageChinese
English
Published 09.07.2014
Subjects
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
PHYSICS
TESTING
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Summary:The utility model discloses an electrical sample stage of an X fluorescence thickness gauge, which comprises an XY-axis positioning assembly, a Z-axis positioning assembly, a sample stage plate, a bottom plate, and a controller, wherein the Z-axis positioning assembly is arranged on the bottom plate; the top of the XY-axis positioning assembly is provided with the sample stage plate; the Z-axis positioning assembly comprises a Z-axis vertical plate, a Z-axis linear sliding rail, a sliding plate guide sliding block, a Z-axis servo screw rod, a Z-axis servo motor , a Z-axis sliding plate assembly, a Z-axis bearing seat, a Z-axis switch connection guide rail, two Z-axis photoelectric switches, and a Z-axis limiting induction sheet; the sliding plate guide sliding block is in sliding connection with the Z-axis linear sliding rail; one side, close to the Z-axis switch connection guide rail, of the Z-axis sliding plate assembly is provided with the Z-axis limiting induction sheet; the top part of the Z-axis sliding
Bibliography:Application Number: CN20132846406U