Manual wafer picker suitable for large-diameter wafer processing

• Main Authors: BIAN YONGZHI, ZHANG LIANG, SHI XUNDA, ZHAO JING, ZHAO WEI, NING YONGDUO, ZHANG JING
• Format: Patent
• Language: Chinese; English
• Published: 21.05.2014
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

The utility model provides a manual wafer picker suitable for large-diameter wafer processing. The manual wafer picker comprises a cylinder shape main body, wherein a lower end of the main body is equipped with a central absorption disc, and an upper end of the main body is equipped with a handle; the main body is also provided with a pressure discharging hole and a vacuum pipe connection port; three telescoping pipes are mounted at a middle part of the main body, and tail ends of the three telescoping pipes are respectively equipped with an auxiliary absorption discs. In the manual wafer picker, four absorption discs are contacted with the wafer to absorb the wafer, so that the wafer is prevented from deformation, a break rate of the wafer is reduced, and wafer lose is reduced. The manual wafer picker which is applicable for wafers with different diameters through simple adjustment, is convenient and practical.