Condensing unit for vacuum coating equipment

• Main Authors: WANG YUYAN, CHEN GUANBI, LAI WENBO, HUANG SHIREN, ZHAO HENGWEN, REN CHANGBAO, ZENG ZHAOLONG, LIAO KEFENG
• Format: Patent
• Language: Chinese; English
• Published: 19.02.2014
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; PERFORMING OPERATIONS; PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL; SEPARATION; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; TRANSPORTING

The utility model discloses a condensing unit for vacuum coating equipment. The condensing unit comprises an air inlet pipe, an air outlet pipe, and a cold trap assembly which is arranged between the air inlet pipe and the air outlet pipe, wherein the cold trap assembly comprises a first arc-shaped bent pipe and a second arc-shaped bent pipe; the first arc-shaped bent pipe and the air inlet pipe are connected with each other through a cold trap pipe, the first arc-shaped bent pipe and the second arc-shaped bent pipe are connected with each other through a cold trap pipe, and the second arc-shaped bent pipe and the air outlet pipe are connected with each other through a cold trap pipe; a baffle group is arranged in each cold trap pipe; each baffle group is provided with a plurality of inclined baffles which are arranged side by side, and cooling water pipes which are each propped against each inclined baffle. Therefore, steam from a cavity can be successfully condensed on the surface of each inclined baffle wh