High-purity gas confluence filling line

• Main Authors: MIAO GUANTONG, WU QIONG, MIAO JIATONG, SONG ZHAODE
• Format: Patent
• Language: Chinese; English
• Published: 12.02.2014
• Subjects: BLASTING; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED,LIQUEFIED, OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; HEATING; LIGHTING; MECHANICAL ENGINEERING; STORING OF DISTRIBUTING GASES OR LIQUIDS; VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED ORSOLIDIFIED GASES; WEAPONS

The utility model discloses a high-purity gas confluence filling line. The high-purity gas confluence filling line comprises a circulation pipeline, a nitrogen valve, an exhaust valve, a connector valve, a waste liquid tank and a waste liquid valve, wherein one end of the nitrogen valve is connected with high-purity nitrogen, and the other end of the nitrogen valve is connected with the circulation pipeline; one end of the exhaust valve is connected with the waste liquid tank, and the other end of the exhaust valve is communicated with the circulation pipeline; the connector valve is used for connecting a high-purity gas source or a steel cylinder, and the waste liquid valve is connected in series between the waste liquid tank and the exhaust valve. The high-purity gas confluence filling line disclosed by the utility model has the advantages that the operations of high-purity blowing by using high-purity nitrogen, pumping a waste liquid in the cylinder into the waste liquid tank and filling the high-purity ga