Titanium-platinum-gold beam-type lead wire system for pressure sensor

• Main Authors: CHENG SHAOLONG, WANG YABIN, FAN CHUANDONG, NI XINGPING
• Format: Patent
• Language: Chinese; English
• Published: 09.05.2012
• Subjects: MEASURING; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE; PHYSICS; TESTING

A titanium-platinum-gold beam-type lead wire system for a pressure sensor comprises four piezoresistors arranged on a Wheatstone bridge, wherein the two ends of each of the piezoresistors are connected with titanium alloy nodes arranged at four corners through gold-plated lead wires respectively; trumpet-shaped platinum connecting surfaces are arranged at the positions of two ends of each of the piezoresistors, which are connected with the gold-plated leads respectively; and the external wires of the titanium alloy nodes are connected with an external circuit. The titanium-platinum-gold beam-type lead wire system can reduce the contact resistance of metal and a resistor and prevent the electrical performance of the sensor under high temperature or high current density from degrading, thereby realizing the reliable connection of internal and external lead wires of a sensor chip and improving the high temperature reliability of the sensor.