Silicon wafer pushing device

• Main Authors: ZHANG HONGJIAN, HUANG PING, ZHOU ZUWU, GAO YI, ZHAO JIANJING, ZHU DAOFENG, WANG GUOHUA
• Format: Patent
• Language: Chinese; English
• Published: 18.05.2011
• Subjects: BASIC ELECTRIC ELEMENTS; CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION ORPROCESSING OF GOODS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; SEMICONDUCTOR DEVICES; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS; TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINSTCLIMATE CHANGE

A silicon wafer pushing device comprises a base for supporting a quartz boat and a silicon wafer loading flower basket, pushing tooth slices equidistantly provided with a plurality of pushing teeth, a pushing plate, a pulling rod, a guide sliding rail and a connecting part, wherein the pushing tooth slices are respectively arranged on opposite side surfaces of the pushing plate, the guide sliding rail is fixed at the bottom of the base, the pulling rod is arranged on the guide sliding rail, one end of the connecting part is connected with the pushing plate, and the other end of the connecting part is connected with the pulling rod. The silicon wafer loading flower basket and the quartz boat loaded with silicon wafers are simultaneously and fixedly arranged on the base of the silicon wafer pushing device, the pushing teeth of the silicon wafer pushing device are respectively aligned with the silicon wafers placed in the quartz boat, the pulling rod is moved to pull the pushing plate to move through the connect