Method and apparatus to help promote contact of gas with vaporized material
Apparatus and method for enhancement of contact of gas with vaporized material, which in an illustrative arrangement includes a system (100) that delivers a desired gas from a vaporizer (110) to process equipment (120) coupled to vaporizer (110). Vaporizer (110) vaporizes material, receives a gas fr...
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Main Author | |
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Format | Patent |
Language | English |
Published |
04.07.2007
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Subjects | |
Online Access | Get full text |
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