Micro electromechanical system switch

The invention a MEMS (micro electro mechanical system) switch, which includes a substrate; a fixed electrode formed on an upper side of the substrate; a signal line formed on both sides of the fixed electrode; a contact member formed on an upper side of the signal line at a distance from said fixed...

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Bibliographic Details
Main Author KIM CHE-HEUNG,CHOI HYUNG,SONG IN-SANG,LEE SANG-HUN,KWON SANG-WOOK
Format Patent
LanguageEnglish
Published 20.06.2007
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SWITCHES
ELECTRICITY
EMERGENCY PROTECTIVE DEVICES
RELAYS
RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
SELECTORS
WAVEGUIDES
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Summary:The invention a MEMS (micro electro mechanical system) switch, which includes a substrate; a fixed electrode formed on an upper side of the substrate; a signal line formed on both sides of the fixed electrode; a contact member formed on an upper side of the signal line at a distance from said fixed electrode and contacting an edging portion of the signal line; a supporting member supporting the contact member to be movable; and a moving electrode disposed on an upper side of the supporting member.
Bibliography:Application Number: CN200610163108