Layout for detected device arrays used in semiconductor wafer testing
A layout for devices under test formed on a semiconductor wafer for use in wafer testing includes a first array of devices under test and a first pad set formed adjacent to the first array. The first pad set includes a gate force pad, a source pad, and a drain pad. Each of the devices under test in...
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Main Author | |
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Format | Patent |
Language | English |
Published |
06.06.2007
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Subjects | |
Online Access | Get full text |
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Summary: | A layout for devices under test formed on a semiconductor wafer for use in wafer testing includes a first array of devices under test and a first pad set formed adjacent to the first array. The first pad set includes a gate force pad, a source pad, and a drain pad. Each of the devices under test in the first array is connected to the gate pad of the first pad set. Each of the devices under test in the first array is connected to the source pad of the first pad set. Each of the devices under test in the first array is connected to the drain pad of the first pad set. |
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Bibliography: | Application Number: CN20061172887 |