Dielectric element and method for manufacturing the same

• Main Author: KATOH TOMOHIKO,HORINO KENJI
• Format: Patent
• Language: English
• Published: 06.06.2007
• Subjects: BASIC ELECTRIC ELEMENTS; CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES ORLIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE; ELECTRICITY

The invention relates to a method for manufacturing a capacitor including the steps of: preparing a lower electrode; forming a dielectric on the lower electrode to fabricate a first laminated structure; annealing the first laminated structure; forming an upper electrode on a dielectric film to fabri...