Dielectric element and method for manufacturing the same
The invention relates to a method for manufacturing a capacitor including the steps of: preparing a lower electrode; forming a dielectric on the lower electrode to fabricate a first laminated structure; annealing the first laminated structure; forming an upper electrode on a dielectric film to fabri...
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| Main Author | |
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| Format | Patent |
| Language | English |
| Published |
06.06.2007
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| Subjects | |
| Online Access | Get full text |
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| Abstract | The invention relates to a method for manufacturing a capacitor including the steps of: preparing a lower electrode; forming a dielectric on the lower electrode to fabricate a first laminated structure; annealing the first laminated structure; forming an upper electrode on a dielectric film to fabricate a second laminated structure; and annealing the second laminated structure under a reduced pressure atmosphere at a temperature of 150 DEG C or higher. |
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| AbstractList | The invention relates to a method for manufacturing a capacitor including the steps of: preparing a lower electrode; forming a dielectric on the lower electrode to fabricate a first laminated structure; annealing the first laminated structure; forming an upper electrode on a dielectric film to fabricate a second laminated structure; and annealing the second laminated structure under a reduced pressure atmosphere at a temperature of 150 DEG C or higher. |
| Author | KATOH TOMOHIKO,HORINO KENJI |
| Author_xml | – fullname: KATOH TOMOHIKO,HORINO KENJI |
| BookMark | eNrjYmDJy89L5WSwcMlMzUlNLinKTFYAMnJT80oUEvNSFHJTSzLyUxTS8osUchPzStMSk0tKizLz0hVKMlIVihNzU3kYWNMSc4pTeaE0N4O8m2uIs4duakF-fGpxQWJyal5qSbyzn6GluamliamjMWEVAFAOL0E |
| ContentType | Patent |
| DBID | EVB |
| DatabaseName | esp@cenet |
| DatabaseTitleList | |
| Database_xml | – sequence: 1 dbid: EVB name: esp@cenet url: http://worldwide.espacenet.com/singleLineSearch?locale=en_EP sourceTypes: Open Access Repository |
| DeliveryMethod | fulltext_linktorsrc |
| Discipline | Medicine Chemistry Sciences |
| ExternalDocumentID | CN1975945A |
| GroupedDBID | EVB |
| ID | FETCH-epo_espacenet_CN1975945A3 |
| IEDL.DBID | EVB |
| IngestDate | Fri Aug 23 06:59:49 EDT 2024 |
| IsOpenAccess | true |
| IsPeerReviewed | false |
| IsScholarly | false |
| Language | English |
| LinkModel | DirectLink |
| MergedId | FETCHMERGED-epo_espacenet_CN1975945A3 |
| Notes | Application Number: CN200610163302 |
| OpenAccessLink | https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20070606&DB=EPODOC&CC=CN&NR=1975945A |
| ParticipantIDs | epo_espacenet_CN1975945A |
| PublicationCentury | 2000 |
| PublicationDate | 20070606 |
| PublicationDateYYYYMMDD | 2007-06-06 |
| PublicationDate_xml | – month: 06 year: 2007 text: 20070606 day: 06 |
| PublicationDecade | 2000 |
| PublicationYear | 2007 |
| RelatedCompanies | TDK CORP |
| RelatedCompanies_xml | – name: TDK CORP |
| Score | 2.674844 |
| Snippet | The invention relates to a method for manufacturing a capacitor including the steps of: preparing a lower electrode; forming a dielectric on the lower... |
| SourceID | epo |
| SourceType | Open Access Repository |
| SubjectTerms | BASIC ELECTRIC ELEMENTS CAPACITORS CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES ORLIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE ELECTRICITY |
| Title | Dielectric element and method for manufacturing the same |
| URI | https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20070606&DB=EPODOC&locale=&CC=CN&NR=1975945A |
| hasFullText | 1 |
| inHoldings | 1 |
| isFullTextHit | |
| isPrint | |
| link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwdV3dS8MwED_mFPVNpzK_8yB9K7Zr-vVQxKUtQ7AbMmVvI20z7MOyYTv8972mq_qyt5DAcQn8cnfJ3e8AHlzHwTg5S3WLWpZOM-rrvmtwvfbtOU0NbnLF9pk4o3f6MrNnHfhsa2EUT-i3IkdERGWI90rd1-u_R6xQ5VaWj2mBU6uneBqEWhsd11wwjhYOg2gyDsdMYyxgiZa8Babv2j61n_dgH51ot8ZC9DGsa1LW_w1KfAIHE5Qlq1PoCNmDI9b2XevB4ev2uxuHW-SVZ-CFRdOxpsiIaFK-CZc5aTpAE3Q9yZLLTV2noAoPCTp2pORLcQ73cTRlIx1VmP_uds6SVlfrArpyJUUfyGBQ09yYZp5jRJbnCCpFluWJzKPWQpiX0N8l5Wr30jUct-lvhnMD3eprI27RxlbpnTqeH6vzgAk |
| link.rule.ids | 230,309,783,888,25576,76876 |
| linkProvider | European Patent Office |
| linkToHtml | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwdV1LT8MwDLbGQIwbDNB4LgfUW8W6pq9DhVjaqsDWTWig3aa0DWKHdRPtxN_HTVfgsluUSJYT6YvtxP4McGeZJsbJSazqVNdVmlBHdaweV0vfntO4xzUu2T4jM3yjzzNj1oDPuhZG8oR-S3JERFSCeC_kfb3-e8TyZG5lfh8vcGr1EExdT6mj45ILxlS8getPxt6YKYy5LFKiV1dzLMOhxuMe7KODbZVY8N8HZU3K-r9BCY7hYIKysuIEGiJrQ4vVfdfacDjafnfjcIu8_BRsb1F1rFkkRFQp34RnKak6QBN0PcmSZ5uyTkEWHhJ07EjOl-IMuoE_ZaGKKsx_dztnUa2rfg7NbJWJDpB-v6S50bQ0xYgsTRFUkizLFolN9Q-hXUBnl5TL3UtdaIXT0XA-fIperuCoToXrmdfQLL424gbtbRHfyqP6Adgigvw |
| openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Apatent&rft.title=Dielectric+element+and+method+for+manufacturing+the+same&rft.inventor=KATOH+TOMOHIKO%2CHORINO+KENJI&rft.date=2007-06-06&rft.externalDBID=A&rft.externalDocID=CN1975945A |