Organic material deposition apparatus and deposition method

• Main Author: HWANG CHANG-HUN,LIM GUN-MOOK,WON YOU-TAE,NOH SOK-WON,KIM KWANG-HO,KANG TAEK-SANG,KIM SEUNG-HAN
• Format: Patent
• Language: English
• Published: 16.05.2007
• Subjects: ELECTRIC HEATING; ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY

The invention relates to an organic material deposition apparatus and a deposition method, particularly, to an organic material deposition apparatus and a deposition method designed to prevent the sagging of a large size substrate in a chamber transfered to the apparatus in a deposition process. The apparatus comprises: a chamber provided with an internal space isolated from the outside, and provided with an entrance to which a substrate is carried-in or carried-out on on side; a substrate loading stand provided on the upper side in the chamber, fixing both the ends of the carried substrate by pressurizing force, respectively, moving one end in both the fixed ends of the substrate to the outside direction, and applying tensile force to the substrate so as to reduce the amount of the substrate to be sagged; a rotary elevation part joined to the upper central part of the substrate loading stand and allowing the substrate loading stand to rotate or elevate; and a heating part and an organic material boat provided at the lower part in the chamber and vaporizing the organic material, so as to be evaporated to the substrate.