Gas supply integration unit

• Main Author: TAKEICHI AKIHIRO,AOYAMA TATSUHITO,MIWA TOSHIKAZU,INOUE TAKASHI
• Format: Patent
• Language: English
• Published: 18.04.2007
• Subjects: BASIC ELECTRIC ELEMENTS; BLASTING; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; HEATING; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; LIGHTING; MECHANICAL ENGINEERING; METALLURGY; PIPE-LINE SYSTEMS; PIPE-LINES; SEMICONDUCTOR DEVICES; STORING OF DISTRIBUTING GASES OR LIQUIDS; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; WEAPONS

A gas supply integration unit for supplying a process gas, which is liable to be liquefied at room temperatures and pressures, while heating and insulating the process gas. The unit comprises a plurality of gas units. Each gas unit is formed of a first manual valve (22) installed in an outlet flow passage, an air operated valve (26) installed at a position where the first manual valve (22) is allowed to communicate with a process gas common flow passage (44), and a second manual valve (25) installed at a position where the first manual valve (22) is allowed to communicate with a purge gas common flow passage (43) which are integrally connected in series to each other through flow passage blocks (46) and unit fixing plates (15). The unit also comprises holding members (18) formed in a U-shape in cross section and to which the flow passage blocks (46) and the unit fixing plates (15) are fitted and plane heaters (16) fixedly held between the holding members (18), the flow passage blocks (46), and the unit fixing plates (15).