Beam measuring equipment and beam measuring method using the same

• Main Author: SASAKI YUICHIRO,WATANABE TAMAKI,KAWAGUCHI TAKEO,WATANABE SHINICHI,KATAYAMA TAKESHI,MIZUNO BUNJI,KANADA HISATAKA
• Format: Patent
• Language: English
• Published: 21.02.2007
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; GAMMA RAY OR X-RAY MICROSCOPES; IRRADIATION DEVICES; MEASUREMENT OF NUCLEAR OR X-RADIATION; MEASURING; MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES; NUCLEAR ENGINEERING; NUCLEAR PHYSICS; PHYSICS; PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS; SEMICONDUCTOR DEVICES; TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOTOTHERWISE PROVIDED FOR; TESTING

The present invention provides a beam measuring device which can measure a beam current value with high accuracy in a non-destructive manner and, at the same time, can measure a position of a beam. A measuring device includes a magnetic shielding part for shielding an outer magnetic field, and a plurality of magnetic field sensors which are arranged in a shielding space which is formed by the magnetic shielding part, wherein the magnetic field sensor includes a plurality of magnetic field collection mechanisms which collect magnetic fields which the beam current to be measured generates, and the magnetic field collection mechanism is a cylindrical structural body which has at least a surface thereof formed of a superconductive body and includes a bridge portion which has only a portion thereof formed of a superconductive body on an outer peripheral portion thereof, and a magnetic field which the beam current to be measured generates is measured by the magnetic field sensors. Due to the arrangement of the plurality of magnetic field sensors, a beam position and a beam current can be detected.