Lift pin module of FPD manufacturing machine

The invention provides a lift pin module of flat panel display manufacturing equipment, applied in a base plate process deice including: a lower electrode, on which a base plate is mounted; and a lift pin module of the base plate supported and mounted on the lower electrode, characterized in that th...

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Bibliographic Details
Main Author LEE CHOONG,CHOE JUN-JIN,KIM CHUNI,LEE CHANG-GEN,KIM DONG-SOO,LEE CHONG-BIN,HWANG CHOOO,SONHENG-GRU,LEE SEUNG-UK,CHEE BYONG-O,CHOE SANGUN,KIM LYONG-TAI
Format Patent
LanguageEnglish
Published 13.12.2006
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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