Lift pin module of FPD manufacturing machine

The invention provides a lift pin module of flat panel display manufacturing equipment, applied in a base plate process deice including: a lower electrode, on which a base plate is mounted; and a lift pin module of the base plate supported and mounted on the lower electrode, characterized in that th...

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Bibliographic Details
Main Author LEE CHOONG,CHOE JUN-JIN,KIM CHUNI,LEE CHANG-GEN,KIM DONG-SOO,LEE CHONG-BIN,HWANG CHOOO,SONHENG-GRU,LEE SEUNG-UK,CHEE BYONG-O,CHOE SANGUN,KIM LYONG-TAI
Format Patent
LanguageEnglish
Published 13.12.2006
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:The invention provides a lift pin module of flat panel display manufacturing equipment, applied in a base plate process deice including: a lower electrode, on which a base plate is mounted; and a lift pin module of the base plate supported and mounted on the lower electrode, characterized in that the lift pin module comprises an upper lift pin which moves up and down by running through the lift pin hole formed on the lower electrode so as to support the base plate; a lower lift pin coupled with lower end of the upper lift pin, having a holding tank formed on upper end of the lower lift pin; and a pin coupler, of which the upper end is formed with a hole and lower end has an insertion protrusion inserting into the holding tank. The insertion protrusion is capable of moving front and rear in the holding tank.
Bibliography:Application Number: CN200610079818