Solid immersion lens holder

An arrangement wherein a holder (9) supports a solid immersion lens (3) in the self-weight direction with the bottom of the solid immersion lens (3) projecting downward through an opening (9b). Thereby, when placed on a subject of observation, the solid immersion lens (3) is raised by the subject of...

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Bibliographic Details
Main Author TANABE HIROSHI,ARATA IKUO,TERADA HIROTOSHI
Format Patent
LanguageEnglish
Published 06.12.2006
Subjects
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
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Summary:An arrangement wherein a holder (9) supports a solid immersion lens (3) in the self-weight direction with the bottom of the solid immersion lens (3) projecting downward through an opening (9b). Thereby, when placed on a subject of observation, the solid immersion lens (3) is raised by the subject of observation and kept free with respect to the holder (9). Further, at this time, the possibility of excessive pressure being imposed on the subject of observation is eliminated, and the solid immersion lens (3) comes into fitted and close contact with the subject of observation, and temperature drift on the holder (9) side or subject of observation side is cut off from the associating side to eliminate the influence due to temperature drift. Thus, a solid immersion lens holder eliminating the possibility of causing damage to the subject of observation and enabling observation with high accuracy is obtained.
Bibliography:Application Number: CN200480032468