Junction forming method and object to be processed and formed by using same
A method for forming a shallow junction with high accuracy and with a high throughput in a simple step. A state of the surface of a substrate suitable for the wavelength of an electromagnetic wave to be applied is set up. Thereafter, the electromagnetic wave is applied to electrically activate impur...
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| Main Author | |
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| Format | Patent |
| Language | English |
| Published |
22.11.2006
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| Subjects | |
| Online Access | Get full text |
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| Abstract | A method for forming a shallow junction with high accuracy and with a high throughput in a simple step. A state of the surface of a substrate suitable for the wavelength of an electromagnetic wave to be applied is set up. Thereafter, the electromagnetic wave is applied to electrically activate impurities so that the excitation energy is efficiently absorbed in an impurity thin film. Thus, a shallow junction is efficiently formed. |
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| AbstractList | A method for forming a shallow junction with high accuracy and with a high throughput in a simple step. A state of the surface of a substrate suitable for the wavelength of an electromagnetic wave to be applied is set up. Thereafter, the electromagnetic wave is applied to electrically activate impurities so that the excitation energy is efficiently absorbed in an impurity thin film. Thus, a shallow junction is efficiently formed. |
| Author | SASAKI YUICHIRO,JIN CHENG-GUO,MIZUNO BUNJI |
| Author_xml | – fullname: SASAKI YUICHIRO,JIN CHENG-GUO,MIZUNO BUNJI |
| BookMark | eNrjYmDJy89L5WTw9irNSy7JzM9TSMsvys3MS1fITS3JyE9RSMxLUchPykpNLlEoyVdISlUoKMpPTi0uToVIgVQDmUmVCqXFIF3FibmpPAysaYk5xam8UJqbQd7NNcTZQze1ID8-tbggMTk1L7Uk3tnP0MLMwsDY1NGYsAoAd6012g |
| ContentType | Patent |
| DBID | EVB |
| DatabaseName | esp@cenet |
| DatabaseTitleList | |
| Database_xml | – sequence: 1 dbid: EVB name: esp@cenet url: http://worldwide.espacenet.com/singleLineSearch?locale=en_EP sourceTypes: Open Access Repository |
| DeliveryMethod | fulltext_linktorsrc |
| Discipline | Medicine Chemistry Sciences |
| ExternalDocumentID | CN1868035A |
| GroupedDBID | EVB |
| ID | FETCH-epo_espacenet_CN1868035A3 |
| IEDL.DBID | EVB |
| IngestDate | Fri Jul 19 12:15:47 EDT 2024 |
| IsOpenAccess | true |
| IsPeerReviewed | false |
| IsScholarly | false |
| Language | English |
| LinkModel | DirectLink |
| MergedId | FETCHMERGED-epo_espacenet_CN1868035A3 |
| Notes | Application Number: CN2004829733 |
| OpenAccessLink | https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20061122&DB=EPODOC&CC=CN&NR=1868035A |
| ParticipantIDs | epo_espacenet_CN1868035A |
| PublicationCentury | 2000 |
| PublicationDate | 20061122 |
| PublicationDateYYYYMMDD | 2006-11-22 |
| PublicationDate_xml | – month: 11 year: 2006 text: 20061122 day: 22 |
| PublicationDecade | 2000 |
| PublicationYear | 2006 |
| RelatedCompanies | MATSUSHITA ELECTRIC IND CO., LTD |
| RelatedCompanies_xml | – name: MATSUSHITA ELECTRIC IND CO., LTD |
| Score | 2.6643436 |
| Snippet | A method for forming a shallow junction with high accuracy and with a high throughput in a simple step. A state of the surface of a substrate suitable for the... |
| SourceID | epo |
| SourceType | Open Access Repository |
| SubjectTerms | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES |
| Title | Junction forming method and object to be processed and formed by using same |
| URI | https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20061122&DB=EPODOC&locale=&CC=CN&NR=1868035A |
| hasFullText | 1 |
| inHoldings | 1 |
| isFullTextHit | |
| isPrint | |
| link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwdV3dT4MwEL_MadQ3nZr53QfDG3GDwsYDMa5AlpmxxUyzt4WuZfogEMEY_3uvMKYve7u0zeXS9Pq7Xu8D4M4RMZ4Cx9TxsUx1iqTuWILqJqVWbCDgL_sqd3gc2sMXOppb8wa81bkwZZ3Q77I4ImrUEvW9KO_r7M-J5ZWxlfk9f8eh9CGYuZ62eR2j-WBo3sD1pxNvwjTGXBZq4bOrqsJ3TOtxB3aVEa2q7PuvA5WTkv0HlOAI9qbIKymOoSGTFhywuu9aC_bH6-9uJNeal5_A0wgBSMlFlJWJeEOq3s8kSgRJufKmkCIlXJKsCv2X1ZRajST_ISrCfUXy6EOewm3gz9hQR6kWmw1YsLAW3zyDZpImsg3IkEeRpLYpnCWlwo76nAva7fWkiEXkdM6hvY3LxfapSzgsnQzdrm4YV9AsPr_kNcJuwW_KHfsFqaCIIA |
| link.rule.ids | 230,309,786,891,25594,76903 |
| linkProvider | European Patent Office |
| linkToHtml | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwdV3dT8IwEL8gGvFNUYOf9MHsbZFtHbCHxUgHQT4GMdPwRta1oA9uRGaM_73X8qEvvF3a5nJpev31rvcBcOeJGZ4CzzHRWKYmRdL0XEFNh1J3ZiPgJ02VOzwM690X2pu4kwK8bXJhdJ3Qb10cETUqQX3P9X29-HNiBTq2cnnP33Eoe-hEfmBsrWN8PthG0PLb41EwYgZjPguN8NlXVeFrjvu4B_sNNAi1ofTaUjkpi_-A0jmGgzHySvMTKMi0DCW26btWhsPh-rsbybXmLU-h30MAUnIR9cpEvCGr3s8kTgXJuPKmkDwjXJLFKvRfrqbUaiT5D1ER7nOyjD_kGVQ77Yh1TZRqut2AKQs34jvnUEyzVFYAGfI4lrTuCC-hVNTjJueCWo2GFDMRe7ULqOzicrl7qgqlbjQcTAdPYf8KjrTDwbJM276GYv75JW8QgnN-q3fvFyx9iwo |
| openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Apatent&rft.title=Junction+forming+method+and+object+to+be+processed+and+formed+by+using+same&rft.inventor=SASAKI+YUICHIRO%2CJIN+CHENG-GUO%2CMIZUNO+BUNJI&rft.date=2006-11-22&rft.externalDBID=A&rft.externalDocID=CN1868035A |