Transmitted electron microscope sample preparing method for step coverage detection

The disclosed preparation method for TEM sample for the barrier/seed ladder coverage check comprises: depositing barrier and seed layer on electronic medium of semiconductor substrate by PVD method, then depositing one coverage layer to prevent seed agglomeration; finally, sampling. This invention i...

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Bibliographic Details
Main Author CHONGSHI,GAO NIU
Format Patent
LanguageEnglish
Published 22.11.2006
Subjects
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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Summary:The disclosed preparation method for TEM sample for the barrier/seed ladder coverage check comprises: depositing barrier and seed layer on electronic medium of semiconductor substrate by PVD method, then depositing one coverage layer to prevent seed agglomeration; finally, sampling. This invention is fit to accurate measurement.
Bibliography:Application Number: CN2005125977