Pressure sensor device

This pressure sensor device comprises a thin sheet-like diaphragm (12) whose surface is formed with a strain resistance gauge, and a stop member (13) having a recess (14) forming a curve along the displacement forming surface of the diaphragm, with the recess facing the diaphragm. Particularly, the...

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Bibliographic Details
Main Author YONEDA MASAYUKI,MIZOGUCHI JUN,KAJIO YASUHIRO,ISHIKAWA MASAYA,AZUMA YOUICHI,TSUCHIYA NAOHISA
Format Patent
LanguageEnglish
Published 27.09.2006
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
MEASURING
MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE
PHYSICS
SEMICONDUCTOR DEVICES
TESTING
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Summary:This pressure sensor device comprises a thin sheet-like diaphragm (12) whose surface is formed with a strain resistance gauge, and a stop member (13) having a recess (14) forming a curve along the displacement forming surface of the diaphragm, with the recess facing the diaphragm. Particularly, the recess in the stop member is formed as a curved surface in which its depth (y) with respect to overpressure protection operating pressure (p) at a distance (x) from the center of the diaphragm is expressed by a quartic function [y = pr (1-x /r ) /64D] where r is the radius, t is the thickness, and D is the bending rigidity of the diaphragm.
Bibliography:Application Number: CN200480023741