Plasma processing device

• Main Author: LEE YOUNGONG,CHOI JOON-JIN,SUN YOUNG-WOOK,LEE CHONG-BIN,LEE CHAN-GE,KOH IN-PE,JIM CHUNI
• Format: Patent
• Language: English
• Published: 02.08.2006
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS; SEMICONDUCTOR DEVICES