Apparatus for calibrating optical scanner, method of manufacturing the same, and method of calibrating optical scanner using the same
Provided is a calibration apparatus for an optical scanner, including a substrate on which a molecule capable of forming an excimer is immobilized. A method of manufacturing the calibration apparatus and a method of calibrating an optical scanner using the calibration apparatus are also provided.
Saved in:
Main Author | |
---|---|
Format | Patent |
Language | English |
Published |
02.08.2006
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
Summary: | Provided is a calibration apparatus for an optical scanner, including a substrate on which a molecule capable of forming an excimer is immobilized. A method of manufacturing the calibration apparatus and a method of calibrating an optical scanner using the calibration apparatus are also provided. |
---|---|
Bibliography: | Application Number: CN200610005868 |