Apparatus for calibrating optical scanner, method of manufacturing the same, and method of calibrating optical scanner using the same

Provided is a calibration apparatus for an optical scanner, including a substrate on which a molecule capable of forming an excimer is immobilized. A method of manufacturing the calibration apparatus and a method of calibrating an optical scanner using the calibration apparatus are also provided.

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Bibliographic Details
Main Author SHIM JEO-YOUNG,JUNG SUNG-OUK,NAMGOONG JI-NA,YOO KYU-TAE,MA JANG-SEOK
Format Patent
LanguageEnglish
Published 02.08.2006
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Summary:Provided is a calibration apparatus for an optical scanner, including a substrate on which a molecule capable of forming an excimer is immobilized. A method of manufacturing the calibration apparatus and a method of calibrating an optical scanner using the calibration apparatus are also provided.
Bibliography:Application Number: CN200610005868