Dielectric multilayer of microelectronic device and method of fabricating the same

• Main Author: WON SEOK-JUN,KWON DAE-JIN,LEE JONG-HO
• Format: Patent
• Language: English
• Published: 31.05.2006
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

A dielectric multilayer suitable for improving a performance of a microelectronic device and a method of fabricating the dielectric multilayer are provided. The dielectric multilayer of the microelectronic device comprises a composite layer which is formed of oxides of two or more different elements...