Micro-electro-mechanical systems (MEMS) device and system and method of producing the same

Saved in:
Bibliographic Details
Main Author BAR-SADEH EYA,TALALAEVSKI ALEXANDER,GINSBURG EYAL
Format Patent
LanguageEnglish
Published 26.04.2006
Subjects
BASIC ELECTRONIC CIRCUITRY
ELECTRICITY
IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES
MICROSTRUCTURAL TECHNOLOGY
PERFORMING OPERATIONS
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
RESONATORS
TRANSPORTING
Online AccessGet full text

Cover

More Information
Bibliography:Application Number: CN2004808168