System and method for sensor replication for ensemble averaging in micro-electromechanical systems (MEMS)
The present invention provides a MEMs-based system (and method) which includes a sensor array including at least two sensors providing a basis for ensemble averaging.
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| Main Authors | , , , , , |
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| Format | Patent |
| Language | Chinese English |
| Published |
05.05.2010
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| Subjects | |
| Online Access | Get full text |
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| Abstract | The present invention provides a MEMs-based system (and method) which includes a sensor array including at least two sensors providing a basis for ensemble averaging. |
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| AbstractList | The present invention provides a MEMs-based system (and method) which includes a sensor array including at least two sensors providing a basis for ensemble averaging. |
| Author | ELEFTHERIOU EVANGELOS S DANG HIEN SHARMA ARUN LANTZ MARK A POZIDIS CHARALAMPOS SRI-JAYANTHA SRI M |
| Author_xml | – fullname: ELEFTHERIOU EVANGELOS S – fullname: POZIDIS CHARALAMPOS – fullname: SRI-JAYANTHA SRI M – fullname: SHARMA ARUN – fullname: LANTZ MARK A – fullname: DANG HIEN |
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| Notes | Application Number: CN2005187698 |
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| RelatedCompanies | IBM |
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| Snippet | The present invention provides a MEMs-based system (and method) which includes a sensor array including at least two sensors providing a basis for ensemble... |
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| SubjectTerms | ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVEREDIN A SINGLE OTHER SUBCLASS CONTROL OR REGULATING SYSTEMS IN GENERAL CONTROLLING FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MEASURING MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR MEASURING QUANTITY OF HEAT MEASURING TEMPERATURE MICROSTRUCTURAL TECHNOLOGY MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS PERFORMING OPERATIONS PHYSICS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS REGULATING SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES TARIFF METERING APPARATUS TESTING THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR TRANSPORTING |
| Title | System and method for sensor replication for ensemble averaging in micro-electromechanical systems (MEMS) |
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