System and method for sensor replication for ensemble averaging in micro-electromechanical systems (MEMS)

• Main Authors: ELEFTHERIOU EVANGELOS S, POZIDIS CHARALAMPOS, SRI-JAYANTHA SRI M, SHARMA ARUN, LANTZ MARK A, DANG HIEN
• Format: Patent
• Language: Chinese; English
• Published: 05.05.2010
• Subjects: ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVEREDIN A SINGLE OTHER SUBCLASS; CONTROL OR REGULATING SYSTEMS IN GENERAL; CONTROLLING; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MEASURING; MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR; MEASURING QUANTITY OF HEAT; MEASURING TEMPERATURE; MICROSTRUCTURAL TECHNOLOGY; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS; PERFORMING OPERATIONS; PHYSICS; PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS; REGULATING; SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES; TARIFF METERING APPARATUS; TESTING; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR; TRANSPORTING

The present invention provides a MEMs-based system (and method) which includes a sensor array including at least two sensors providing a basis for ensemble averaging.