Nano silicon/monocrystalline silicon heterojunction solar cell and preparation method thereof

• Main Author: MEIFANG,ZHANG ZHU
• Format: Patent
• Language: English
• Published: 15.02.2006
• Subjects: BASIC ELECTRIC ELEMENTS; CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION ORPROCESSING OF GOODS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGYGENERATION, TRANSMISSION OR DISTRIBUTION; SEMICONDUCTOR DEVICES; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS; TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINSTCLIMATE CHANGE

This invention relates to solar cell of nano crystal silicon/ monocrystalline silicon heterojunction and its preparation method belonged to solar cell device preparation technique field, wherein, the solar cell comprises Al back electrode prepared by vacuum heat evaporation method, p-type monocrystalline silicon, I-type nano crystal silicon, nesa formed Ag grid by evaporation technique, and metal grid; wherein, growing I-type and n-doping nano crystal silicon thin membranes to form heterostructure by CVD method, depositing nesa as front electrode on heterostructure by vacuum evaporation or sputter method, then forming the thin membrane solar cell of n-nc-Si:H/i-nc-Si:H/c-Si structure and conversion rate 17.18%(0.92cm2). the technique of this invention is simple to realize.