Micro interior cavity dimension measuring apparatus and method based on double optical fiber coupling

• Main Author: JIUBIN,CUI TAN
• Format: Patent
• Language: English
• Published: 08.02.2006
• Subjects: MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; PHYSICS; TESTING

The invention discloses a micro internal cavity size measuring apparatus based on double fiber optical coupling, which comprises: a sighting and sending apparatus used to generate sighting signals and feedback the result to the controller, a length-measuring device used to measure the moving distance of the micro cavity in the time internal of opening or ending signals from the sighting and sending apparatus, and a controller used to control all of the automatic measuring course of the measuring device. It is characterized in that the sighting and sending apparatus comprises a laser couple unit, a data gather processing unit and double fiber optical coupling unit, wherein in the double fiber optical coupling unit, it uses a fiber optical as incidence fiber optical; the other one as ejecting fiber optical; one ends of the two pieces of the fiber optical are connected with the coupler. The invention also discloses a micro internal cavity size measuring method based on double fiber optical coupling.