Capacitive sensor

Capacitor electrodes (E1-E5) and a grounded reference electrode (E0) are formed on a substrate (20). A displacement electrode (40) that displaces in the Z-axis direction as a sensing member (30) operated from outside moves in the Z-axis direction is disposed in the position opposed to these electrod...

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Bibliographic Details
Main Author MORIMOTO HIDEO,AGAYA TOMOHIRO
Format Patent
LanguageEnglish
Published 11.01.2006
Subjects
CALCULATING
COMPUTING
COUNTING
ELECTRIC DIGITAL DATA PROCESSING
MEASURING
MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE
PHYSICS
TESTING
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Summary:Capacitor electrodes (E1-E5) and a grounded reference electrode (E0) are formed on a substrate (20). A displacement electrode (40) that displaces in the Z-axis direction as a sensing member (30) operated from outside moves in the Z-axis direction is disposed in the position opposed to these electrodes (E5-E0). The displacement electrode (40) constitutes capacitors (C0-C5) with the capacitor electrodes (E1-E5) and the reference electrode (E0), respectively. Each of the capacitors (C1-C5) is series-connected to the capacitor (C0) with respect to a signal inputted from outside. Change in the capacitance values of the capacitors (C1-C5) when the sensing member (30) moves are detected by a signal processing circuit having a hysteresis characteristic, so that the displacement of the sensing member (30) is recognized.
Bibliography:Application Number: CN20038025762