Oxygen environment scan electronic microscopic method and system

• Main Authors: TAOXING ZHONG, YUAN JI, HANSHENG GUO
• Format: Patent
• Language: English
• Published: 02.03.2005
• Edition: 7
• Subjects: APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM]; MEASURING; PHYSICS; SCANNING-PROBE TECHNIQUES OR APPARATUS; TESTING

The invention relates to a direct observing and analyzing method and system to non conducting material in oxygen atmosphere created by injecting oxygen in minute quantities into scanning electron microscope. It has the property that before, scanning sample, active oxygen in minute quantities is injected into sample chamber to decrease or eliminate charged phenomenon of non conducting sample. Vacuum model is chosen before injecting oxygen, whose pressure is decreased through pressure reducing valve, degree of vacuum of sample chamber is monitored by vacuometer and vacuum gauge, needle valve is used to decrease flux of oxygen right along. Oxygen injected has little influence to the degree of vacuum of scanning electron microscope system, realizing oxygen atmosphere observation condition under different vacuum model. Oxygen microinjection system is install on sidewall of sample chamber to coordinate with oxygen atmosphere scanning electron microscope method, consisted of air feed loop, vacuum checkout systems and absorption current checkout systems. The invention has reached the goal of effectively eliminating sample of non conducting like oxide and hydroxide which will generate charged effect when does electric electron microanalysis.