Extraction method of defect density and size distributions

• Main Authors: C. HESS, B.E. STINE, D. STASHOWER
• Format: Patent
• Language: Chinese; English
• Published: 12.05.2004
• Edition: 7
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; MEASURING; MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES; PHYSICS; SEMICONDUCTOR DEVICES; TESTING

一种特征载体，包括：具有至少一层的基底(300)；以及多对嵌套蛇形线，其在单层基底的单个表面上(301a...301h，302a...302h)，每对嵌套蛇形线具有其间共享的焊盘(312a...312h)。 A characterization vehicle includes a substrate having at least one layer ( 300 ), and a plurality of pairs of nested serpentine lines on a single surface of a single layer of the substrate ( 301...