Extraction method of defect density and size distributions

一种特征载体，包括：具有至少一层的基底(300)；以及多对嵌套蛇形线，其在单层基底的单个表面上(301a...301h，302a...302h)，每对嵌套蛇形线具有其间共享的焊盘(312a...312h)。 A characterization vehicle includes a substrate having at least one layer ( 300 ), and a plurality of pairs of nested serpentine lines on a single surface of a single layer of the substrate ( 301...

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Bibliographic Details
Main Authors C. HESS, B.E. STINE, D. STASHOWER
Format Patent
LanguageChinese
English
Published 12.05.2004
Edition7
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
SEMICONDUCTOR DEVICES
TESTING
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Summary:一种特征载体，包括：具有至少一层的基底(300)；以及多对嵌套蛇形线，其在单层基底的单个表面上(301a...301h，302a...302h)，每对嵌套蛇形线具有其间共享的焊盘(312a...312h)。 A characterization vehicle includes a substrate having at least one layer ( 300 ), and a plurality of pairs of nested serpentine lines on a single surface of a single layer of the substrate ( 301 a . . . 301 h , 302 a . . . 302 h), each pair of nested serpentine lines having a shared pad between them ( 312 a . . . 312 h).
Bibliography:Application Number: CN20028006431