Method for mfg. mulfilayer circuit board for semiconductor device

• Main Authors: KODAIRA TADASHI, NAKAMURA JYUNICHI, CHINO TAKESHI
• Format: Patent
• Language: Chinese; English
• Published: 10.03.2004
• Edition: 7
• Subjects: BASIC ELECTRIC ELEMENTS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS; PRINTED CIRCUITS; SEMICONDUCTOR DEVICES

本发明涉及半导体器件用多层电路基板(50)的制造方法，包括：使用已使2块金属板一体化了的复合金属板(14)，在该复合金属板的两面上，形成实质上不会被用来刻蚀金属板的刻蚀液刻蚀的金属材料制的半导体元件连接用焊盘，和具有使该焊盘露出来的开口部分的绝缘层，在该绝缘层上形成具有用来连接到上述焊盘上而且连接到后边形成的别的布线层上的焊盘的布线层(26)，然后交互地形成必要的层数的绝缘层和布线层，制作多层电路基板主体(20)，在多层电路基板主体的最外层的绝缘层上，形成具备使位于其上的外部连接端子用焊盘露出来的贯通孔的绝缘层，接着，使复合金属板分离，得到在金属板的单面上具备多层电路基板主体的中间体，然后，在为了装载半导体元件的区域上，对上述金属板进行刻蚀以除去该区域的金属板材料，形成把半导体元件的装载区域围起来的框体(10)。 The invention relates a method for producing a multilayer circuit board ( 50 ) for a semiconductor device, comprising using a composite metal sheet ( 14 ) in which two metal sheets are combined, forming, on each side of the composite metal sheet, pads for connecting to a semiconductor element, the pads being made of a metal material which is substantially not etched by an etchant for the metal sheet, and an insulating layer having openings exposing the pads, forming, on the insulating layer, a wiring line layer ( 26 ) connected to the pads and having pads for connecting to another wiring line layer to be subsequently formed, subsequently fabricating a multilayer circuit board body ( 20 ) by necessary numbers of insulating layers and wiring line layers alternately formed, forming, on the outermost insulating layer of the multilayer circuit board body, an insulating layer provided with through-holes exposing pads for external connecting terminals, which are located on the outermost insulating layer, then dividing the composite metal sheet, to yield intermediates ( 34 ) each provided on one side of the metal sheet with the multilayer circuit board body, and etching the metal sheet at an area at which a semiconductor element is to be mounted to remove the material of the metal sheet at that area, to thereby form a frame ( 10 ) surrounding the area for the mounting of the semiconductor element.