Method and appts. for foult detection of processing tool and control thereof using advanced process control framework
A method and apparatus for providing fault detection in an Advanced Process Control (APC) framework. A first interface receives operational state data of a processing tool related to the manufacture of a processing piece. The state data is sent from the first interface to a fault detection unit. A f...
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Main Authors | , , |
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Format | Patent |
Language | English |
Published |
08.10.2003
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Edition | 7 |
Subjects | |
Online Access | Get full text |
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Summary: | A method and apparatus for providing fault detection in an Advanced Process Control (APC) framework. A first interface receives operational state data of a processing tool related to the manufacture of a processing piece. The state data is sent from the first interface to a fault detection unit. A fault detection unit determines if a fault condition exists with the processing tool based upon the state data. A predetermined action is performed on the processing tool in response to the presence of a fault condition. In accordance with one embodiment, the predetermined action is to shutdown the processing tool so as to prevent further production of faulty wafers. |
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Bibliography: | Application Number: CN20018014522 |