Film piezoelectric element and its manufacture method and actuator
A piezoelectric thin-film element small in leakage current between electrode metal films and its manufacturing method are presented, the piezoelectric thin-film element comprises at least one laminated body composed of a piezoelectric thin-film (4) having mutually facing first surface (4a) and secon...
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| Main Author | |
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| Format | Patent |
| Language | English |
| Published |
26.03.2003
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| Edition | 7 |
| Subjects | |
| Online Access | Get full text |
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| Summary: | A piezoelectric thin-film element small in leakage current between electrode metal films and its manufacturing method are presented, the piezoelectric thin-film element comprises at least one laminated body composed of a piezoelectric thin-film (4) having mutually facing first surface (4a) and second surface (4b), a first electrode metal film (6) on the first surface, and a second electrode metal film (8) on the second surface, in which an electrode separation surface (4c,4d) composed of a piezoelectric thin-film surface parallel to the first surface is provided between the first electrode metal film and second electrode metal film. Thus, side wall deposits (12) formed by dry etching do not cause short-circuits between the electrodes. |
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| Bibliography: | Application Number: CN20021031881 |