Method and apparatus for vacuum film-coating of small size workpiece

• Main Authors: QI DONG, QIYING SHEN, RONGPING LUO
• Format: Patent
• Language: English
• Published: 12.03.2003
• Edition: 7
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

A method and apparatus for vacuum coating of small workpieces are disclosed. Said method is characterized by that the cage containing small workpieces periodically rotates at a certain speed which iscontrolled to make the small workpieces uniformly close to the surface of cage, so eliminating the overlap between workpieces and increasing the efficiency and quality of vacuum coating. Said coatingapparatus is composed of controlled power supply, motor, speed reducer, and vacuum coating chamber which consists of vacuum chamber, cage and multiple evaporating sources.