Lithographic apparatus, device manufacturing method, and device manufactured thereby

• Main Author: JACOBS HERNES,VAN HEUMEN MARK,VOSTERS PETRUS MATTHIJS HENRIC
• Format: Patent
• Language: English
• Published: 18.07.2007
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; BASIC ELECTRIC ELEMENTS; CINEMATOGRAPHY; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ELECTROGRAPHY; ELECTROTHERAPY; HOLOGRAPHY; HUMAN NECESSITIES; HYGIENE; MAGNETOTHERAPY; MATERIALS THEREFOR; MEDICAL OR VETERINARY SCIENCE; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; RADIATION THERAPY; SEMICONDUCTOR DEVICES; ULTRASOUND THERAPY