Precision machining stage equipment

• Main Author: KANO YOSHIO,ONOZAKI JUNICHI
• Format: Patent
• Language: English
• Published: 18.04.2007
• Subjects: BASIC ELECTRIC ELEMENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT; CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILSOF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER; DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING; DYNAMO-ELECTRIC MACHINES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; GENERATION; INSTRUMENT DETAILS; MACHINE TOOLS; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS; METAL-WORKING NOT OTHERWISE PROVIDED FOR; PERFORMING OPERATIONS; PHYSICS; SEMICONDUCTOR DEVICES; TRANSPORTING

A movable table for supporting a work piece is allowed to move on the same plane in arbitrary directions through a table holding mechanism. Also, a feed within the same plane is supplied to the movable table by the electromagnetic driving means. Further, the movable table is stopped by an electromagnetic braking mechanism at an arbitrary position within the same plane. The electromagnetic driving means generates a feed to the movable table by a mutual magnetic effect between driven magnets and driving coils. The electromagnetic braking mechanism includes braking magnets and a nonmagnetic and conductive braking plate. A pair of the braking magnets and braking plate generates braking force by a magnetic effect between a magnetic force by an eddy current generated in the braking plate in accordance with the movement of the movable table and a magnetic force of the braking magnets.