High purity fluid delivery system

A fluid delivery system includes a flow control device and a Coriolis mass flowmeter 112 in fluid communication with the flow control device 110. The Coriolis flowmeter has a flow-tube made of a high-purity plastic material, such as PFA, making the delivery system suitable for high purity applicatio...

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Bibliographic Details
Main Author SUND WESLEY E.,DILLE JOSEPH C.,BARGER MICHAEL J.,PAWLAS GARY E
Format Patent
LanguageEnglish
Published 11.04.2007
Subjects
CONTROLLING
MEASURING
MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE
MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUIDLEVEL
METERING BY VOLUME
PHYSICS
REGULATING
SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
TESTING
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Summary:A fluid delivery system includes a flow control device and a Coriolis mass flowmeter 112 in fluid communication with the flow control device 110. The Coriolis flowmeter has a flow-tube made of a high-purity plastic material, such as PFA, making the delivery system suitable for high purity applications. A controller 114 provides a control output signal to the flow control device 110, which may comprise a pinch valve 120, so as to vary the flow control device output in response to a setpoint signal and measurement signals received from the flowmeter 112.
Bibliography:Application Number: CN20028023425