6D force sensor based on ceramic-thick film technique

A 6D force sensor for the robot reseach to obtain full force information in based on ceramic thick film technique. The elastic structure of sensor is formed by two E-shaped membrane linked by cross ceramic beam. The forcesensitive thick film resistor is sintered on ceramic substrate. The 3D force an...

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Bibliographic Details
Main Authors YUNJIAN GE, YU GE, ZHONGCHENG WU
Format Patent
LanguageEnglish
Published 04.04.2001
Edition7
Subjects
MEASURING
MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE
PHYSICS
TESTING
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Summary:A 6D force sensor for the robot reseach to obtain full force information in based on ceramic thick film technique. The elastic structure of sensor is formed by two E-shaped membrane linked by cross ceramic beam. The forcesensitive thick film resistor is sintered on ceramic substrate. The 3D force and 3D force moment can be measured at same time by special bridging mode and decoupling.
Bibliography:Application Number: CN2000119096