Infrared detecting element and its manufacturing method
The invention provides a compact and high performance infrared radiation detector. The infrared radiation detector contains: a substrate; and at least two infrared radiation detector units selected from the group consisting of a pyroelectric infrared radiation detector unit, a resistive bolometer ty...
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Main Authors | , , |
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Format | Patent |
Language | English |
Published |
08.12.1999
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Edition | 6 |
Subjects | |
Online Access | Get full text |
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Summary: | The invention provides a compact and high performance infrared radiation detector. The infrared radiation detector contains: a substrate; and at least two infrared radiation detector units selected from the group consisting of a pyroelectric infrared radiation detector unit, a resistive bolometer type infrared radiation detector unit and a ferroelectric bolometer type infrared radiation detector unit, the infrared radiation detector units being disposed on the same side of the substrate. |
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Bibliography: | Application Number: CN19991007154 |