Ion plating apparatus

Auxiliary hearths in which annular permanent magnets are built are placed around hearths provided in a vacuum chamber. The directions of the poles of annular permanent magnets provided on adjacent two plasma guns, electromagnet coils, steering coils, and the two annular permanent magnets built in th...

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Bibliographic Details
Main Authors SAKAMI TOSHIYUKI, TANAKA MASARU
Format Patent
LanguageEnglish
Published 20.10.1999
Edition6
Subjects
BASIC ELECTRIC ELEMENTS
CHEMICAL SURFACE TREATMENT
CHEMISTRY
COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
COATING MATERIAL WITH METALLIC MATERIAL
COATING METALLIC MATERIAL
DIFFUSION TREATMENT OF METALLIC MATERIAL
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL
METALLURGY
SEMICONDUCTOR DEVICES
SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Summary:Auxiliary hearths in which annular permanent magnets are built are placed around hearths provided in a vacuum chamber. The directions of the poles of annular permanent magnets provided on adjacent two plasma guns, electromagnet coils, steering coils, and the two annular permanent magnets built in the two hearts are alternatingly opposite to each other.
Bibliography:Application Number: CN1997198505