类金刚石碳层的处理方法

• Format: Patent
• Language: Chinese
• Published: 25.07.2025
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

本发明的类金刚石碳层的处理方法包括：在所述类金刚石碳层上涂覆金属氧化物；以及对所述类金刚石碳层及所述金属氧化物进行激光照射处理，所述激光被配置为使所述类金刚石碳层石墨化。该方法简单高效，能够有效改变类金刚石碳层的结构性质，降低类金刚石层的内应力，提高类金刚石碳层的韧性防止发生脆裂，从而延长使用寿命。